Published December 10, 2014 | Version v1
Journal article

Defect formation in 4H-SiC single crystal grown on the prismatic seeds

  • 1. Micro- and Nanoelectronics Department, St. Petersburg Electrotechnical University, Prof. Popova str. 5, 197376 St. Petersburg (Russian Federation)

Description

The defect structure of 4H silicon carbide single crystals grown by PVT method on three prismatic seeds (10-10), (11-20) and (8.3.-11.0) is considered. The only defects existing in the grown ingots are stacking faults and basal plane dislocations. The type of stacking fault is studied. The dependence of stacking fault morphology on the seed orientation is analyzed

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/572/1/012018

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
572
Journal Issue
1
Journal Page Range
[5 p.]
ISSN
1742-6596

Conference

Title
16. Russian Youth Conference on Physics and Astronomy
Acronym
PhysicA.SPb/2013
Dates
23-24 Oct 2013
Place
St Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47025330
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CRYSTAL GROWTH; DISLOCATIONS; MONOCRYSTALS; MORPHOLOGY; ORIENTATION; SILICON CARBIDES; STACKING FAULTS
Descriptors DEC
CARBIDES; CARBON COMPOUNDS; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; CRYSTALS; LINE DEFECTS; SILICON COMPOUNDS