Contribution of scanning Auger microscopy to electron beam damage study

Electron bombardment can produce surface modifications of the analysed sample. The electron beam effects on solid surfaces which have been discussed in the published literature can be classified into the following four categories: (1) heating and its consequent effects, (2) charge accumulation in insulators and its consequent effects, (3) electron stimulated adsorption (ESA), and (4) electron stimulated desorption and/or decomposition (ESD). In order to understand the physico-chemical processes which take place under electron irradiation in an Al-O system, we have carried out experiments in which, effects, such as heating, charging and gas contamination, were absent. Our results point out the role of an enhanced surface diffusion of oxygen during electron bombardment of an Al (111) sample. The importance of this phenomenon and the contribution of near-elastic scattering of the primary electrons (5 keV) to the increase of the oxidation degree observed on Al (111) are discussed, compared to the generally studied effects