Published November 1995
| Version v1
Journal article
Uniform beam profiles of 5 cm convex gridded ion beam source
- 1. Division of Ceramics, Korea Institute of Science and Technology, Cheongryang P.O. Box 131, Seoul (Korea, Republic of)
- 2. PLATAR, Russia 107065, Moscow, Altaiskaja ul. 7-150 (Russian Federation)
Description
A Kaufman-type 5 cm convex gridded ion-beam source is characterized in terms of angle-resolved ion-beam current density and beam uniformity at various discharge currents, electromagnet currents, and acceleration potentials. copyright 1995 American Institute of Physics
Additional details
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 66
- Journal Issue
- 11
- Journal Page Range
- p. 5379-5380.
- ISSN
- 0034-6748
- CODEN
- RSINAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27023366
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- BEAM CURRENTS; BEAM PROFILES; CONFIGURATION; ELECTRIC DISCHARGES; FARADAY CUPS; GRIDS; ION SOURCES; RESOLUTION
- Descriptors DEC
- BEAM MONITORS; CURRENTS; ELECTRODES; MEASURING INSTRUMENTS; MONITORS