Published November 1995 | Version v1
Journal article

Uniform beam profiles of 5 cm convex gridded ion beam source

  • 1. Division of Ceramics, Korea Institute of Science and Technology, Cheongryang P.O. Box 131, Seoul (Korea, Republic of)
  • 2. PLATAR, Russia 107065, Moscow, Altaiskaja ul. 7-150 (Russian Federation)

Description

A Kaufman-type 5 cm convex gridded ion-beam source is characterized in terms of angle-resolved ion-beam current density and beam uniformity at various discharge currents, electromagnet currents, and acceleration potentials. copyright 1995 American Institute of Physics

Additional details

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
66
Journal Issue
11
Journal Page Range
p. 5379-5380.
ISSN
0034-6748
CODEN
RSINAK

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
27023366
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
BEAM CURRENTS; BEAM PROFILES; CONFIGURATION; ELECTRIC DISCHARGES; FARADAY CUPS; GRIDS; ION SOURCES; RESOLUTION
Descriptors DEC
BEAM MONITORS; CURRENTS; ELECTRODES; MEASURING INSTRUMENTS; MONITORS