Vacuum system of ultrasmall size superconducting SR light source 'Aurora'

Attention is paid to the X-ray lithograph using synchrotron radiation as the technology of promoting the high integration of super-LSI. Sumitomo Heavy Industries Ltd. published the conceptual design of the ultrasmall size superconducting SR light source 'Aurora' in 1986, and constructed the prototype of Aurora for verifying its performance and carrying out the research and development of X-ray lithography. The Aurora succeeded in the emission of SR in November, 1989, and thereafter, the remodeling for improving the performance was carried out. At present it is operated smoothly. In order to install the Aurora as the SR equipment in super-LSI semiconductor factories, ultrasmall size is most important. The Aurora consists of a race track type microtron and a superconducting storage ring. The main parameters of the Aurora are shown. The condition of incorporating the vacuum system, the design specification of the vacuum system, the gas emitted due to SR, the design of the superconducting storage ring and the vacuum system and the present status of the Aurora are reported. (K.I.)