Published 2007
| Version v1
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Cluster ion beams as new instrumentation in nanotechnologies
- 1. OAO TENZOR, Moscow (Russian Federation)
- 2. NIIYaF MGU, Moscow (Russian Federation)
- 3. Fizicheskij Fakul'tet MGU im. M.V. Lomonosova, Moscow (Russian Federation)
Description
no abstract available
Files
39043440.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Пучки кластерных ионов - новый инструментарий в нанотехнологиях
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 178 p.
- Journal Page Range
- p. 138
- Report number
- INIS-RU--505
Conference
- Title
- 37. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XXXVII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2007
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39043440
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ARGON IONS; ION BEAMS; ION IMPLANTATION; ION PAIRS; MILLI AMP BEAM CURRENTS; NANOSTRUCTURES; REVIEWS; SILICON
- Descriptors DEC
- BEAM CURRENTS; BEAMS; CHARGED PARTICLES; CURRENTS; DOCUMENT TYPES; ELEMENTS; IONS; SEMIMETALS
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XXXVII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami