Published 2007 | Version v1
Miscellaneous Open

Cluster ion beams as new instrumentation in nanotechnologies

  • 1. OAO TENZOR, Moscow (Russian Federation)
  • 2. NIIYaF MGU, Moscow (Russian Federation)
  • 3. Fizicheskij Fakul'tet MGU im. M.V. Lomonosova, Moscow (Russian Federation)

Description

no abstract available

Files

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Part of:
Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Пучки кластерных ионов - новый инструментарий в нанотехнологиях

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals
Imprint Pagination
178 p.
Journal Page Range
p. 138
Report number
INIS-RU--505

Conference

Title
37. International conference on physics of interaction of charged particles with crystals
Original Conference Title
XXXVII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
29-31 May 2007
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
39043440
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
ARGON IONS; ION BEAMS; ION IMPLANTATION; ION PAIRS; MILLI AMP BEAM CURRENTS; NANOSTRUCTURES; REVIEWS; SILICON
Descriptors DEC
BEAM CURRENTS; BEAMS; CHARGED PARTICLES; CURRENTS; DOCUMENT TYPES; ELEMENTS; IONS; SEMIMETALS

Optional Information

Notes
1 ref. Imprint:Tezisy dokladov XXXVII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami