Superconducting Coplanar Waveguide Resonators Capable of Cofabrication with Josephson Junctions

Superconducting coplanar waveguide resonators and Josephson junctions are crucial components of superconducting quantum information processing chips. Resonators are usually fabricated through lift-off or etching, while Josephson junctions are made by trilayer process or double-angle evaporation. To simplify the fabrication process, we propose a scheme that uses the same process steps for both Josephson junctions and resonators. Simulations and experiments are conducted to confirm that resonators fabricated via the proposed process have quality factor comparable to those via traditional process. This work paves the way for quantum information processing on superconducting large-scale integrated circuits.