A step towards quantitative electron spectroscopy measurements by improved electron optics

The electron spectroscopy usually operates with a preretardation of electrons in order to improve the resolution of spherical condensers. Hereby generally important parameters are changed which influences the measurements with regard to intensity, resolution and comparability of the spectra. A retardation system with 4 degrees of freedom avoids these disadvantages because the magnification and the aperture are kept constant. This makes a quantitative mode of operation possible. In that way also the signal-to-noise ratio of the spectra can be improved. In addition the space requirement in the vicinity of the specimen is low and the specimen is free from electrical fields. The result is that the analyzer can be used for a multitude of applications. (Auth.)