Elemental analysis using electron beam-induced K X-rays

Representative production cross-sections for bremsstrahlung, which constitutes an unavoidable spectral background in an x-ray analysis using electron beam excitation, have been calculated as a function of target and angle for incident electrons in the energy range 0.2-10 MeV. These values, used in conjunction with the corresponding K x-ray production cross-sections and non-fundamental experimental variables particular to each laboratory (detector resolution and ambient background), determine the feasibility of a K x-ray analysis by direct electron beam excitation, and permit the evaluation of an ideal detection limit. (author)