Published August 19, 2008
| Version v1
Report
Development of a CMOS SOI Pixel Detector
Creators
- Arai, Y.
- Hazumi, M.
- Ikegami, Y.
- Kohriki, T.
- Tajima, O.
- Terada, S.
- Tsuboyama, T.
- Unno, Y.
- Ushiroda, Y.
- KEK, Tsukuba
- Ikeda, H.
- JAXA, Sagamihara
- Hara, K.
- Tsukuba U.
- Ishino, H.
- Tokyo Inst. Tech.
- Kawasaki, T.
- Niigata U.
- Miyake, H.
- Osaka U.
- Martin, E.
- Varner, G.
- Hawaii U.
- Tajima, H.
- SLAC
- Ohno, M.
- Fukuda, K.
- Komatsubara, H.
- Ida, J.
- Stanford Linear Accelerator Center (United States)
Description
We have developed a monolithic radiation pixel detector using silicon on insulator (SOI) with a commercial 0.15 (micro)m fully-depleted-SOI technology and a Czochralski high resistivity silicon substrate in place of a handle wafer. The SOI TEG (Test Element Group) chips with a size of 2.5 x 2.5 mm2 consisting of 20 x 20 (micro)m2 pixels have been designed and manufactured. Performance tests with a laser light illumination and a β ray radioactive source indicate successful operation of the detector. We also briefly discuss the back gate effect as well as the simulation study
Availability note (English)
Available from http://www.slac.stanford.edu/cgi-wrap/getdoc/slac-pub-13374.pdf; http://www.slac.stanford.edu/cgi-wrap/pubpage?slac-pub-13374.html; PURL: https://www.osti.gov/servlets/purl/937201-kNevVL/Additional details
Identifiers
Publishing Information
- Imprint Pagination
- 4 p.
- Report number
- SLAC-PUB--13374
Conference
- Title
- 12. Workshop on Electronics for LHC and Future Experiments
- Acronym
- LECC 2006
- Dates
- 25-29 Sep 2006
- Place
- Valencia (Spain)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 39114598
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- BETA DETECTION; DESIGN; PERFORMANCE; RADIATION DETECTORS; SILICON; SUBSTRATES
- Descriptors DEC
- CHARGED PARTICLE DETECTION; DETECTION; ELEMENTS; MEASURING INSTRUMENTS; RADIATION DETECTION; SEMIMETALS
Optional Information
- Contract/Grant/Project number
- AC02-76SF00515
- Funding organization
- US Department of Energy (United States)