Published August 1, 2006
| Version v1
Journal article
Synthesis and field emission property of SiCN cone arrays
- 1. Nano-center, Department of Physics, East China Normal University, 3663 North Zhongshan Rd., Shanghai 200062 (China)
- 2. Department of Chemistry, Tsinghua University, Beijing 100084 (China)
Description
Silicon carbon nitride (SiCN) cone arrays were synthesized on Si wafers using a microwave plasma chemical vapor deposition reactor with gas mixtures of CH4, SiH4, Ar, H2 and N2 as precursors. The SiCN cones have nanometer-sized tips and their roots vary from nanometers to micrometers in sizes. A lowest turn-on field of 0.6 V μm-1 as well as field emission current densities of 4.7 mA cm-2 at an applied field of 2.8 V μm-1 was obtained from these SiCN cones. Moreover, the SiCN cone arrays exhibited rather stable emission current under constant applied voltage
Additional details
Identifiers
- DOI
- 10.1016/j.matchemphys.2005.09.072;
- PII
- S0254-0584(05)00716-9;
Publishing Information
- Journal Title
- Materials Chemistry and Physics
- Journal Volume
- 98
- Journal Issue
- 2-3
- Journal Page Range
- p. 500-503
- ISSN
- 0254-0584
- CODEN
- MCHPDR
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38079242
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- CARBON NITRIDES; CHEMICAL VAPOR DEPOSITION; CURRENT DENSITY; FIELD EMISSION; HYDROGEN; METHANE; MICROWAVE RADIATION; MIXTURES; SILANES; SILICON; SILICON COMPOUNDS; SYNTHESIS
- Descriptors DEC
- ALKANES; CARBON COMPOUNDS; CHEMICAL COATING; DEPOSITION; DISPERSIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; EMISSION; HYDRIDES; HYDROCARBONS; HYDROGEN COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; PNICTIDES; RADIATIONS; SEMIMETALS; SILICON COMPOUNDS; SURFACE COATING
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.