Published September 2009
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TREK 2D - object oriented program for modeling ion implantation technology
Description
The article considers the algorithm and the demo version of the TREK 2D program which is used to calculate trajectory parameters of charged particles in solids based on the Monte Carlo method. The following aspects are discussed in the paper: choice of programming environment, program architecture, design of microelectronic materials database, and graphical user interface. (authors)
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Additional details
Additional titles
- Original title (Russian)
- TREK 2D - обьектно-ориентированная программа моделирования технологий ионной имплантации
Publishing Information
- Imprint Place
- Minsk (Belarus)
- ISBN
- 978-985-476-728-4
- Imprint Title
- Interaction of radiation with solids. Proceedings of 8. International conference
- Imprint Pagination
- 365 p.
- Journal Page Range
- p. 332-334
- Report number
- INIS-BY--089
Conference
- Title
- 8. International conference 'Interaction of radiation with solids'
- Original Conference Title
- 8. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 23-25 Sep 2009
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 41006890
- Subject category
- S97: MATHEMATICAL METHODS AND COMPUTING; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALGORITHMS; CHARGED PARTICLES; COMPUTER CODES; ION IMPLANTATION; MONTE CARLO METHOD; PARTICLE TRACKS; SIMULATION; SOLIDS
- Descriptors DEC
- CALCULATION METHODS; MATHEMATICAL LOGIC
Optional Information
- Notes
- 6 refs., 1 tabs., 3 figs. Imprint:Vzaimodejstvie izluchenij s tverdym telom. Materialy 8. Mezhdunarodnoj konferentsii