Published 1985 | Version v1
Book Metadata-only

Study of thin conductive films produced at the diamond surface by hafnium and indium implantations

Creators

  • 1. Lisbon Univ. (Portugal)
  • 2. LNETI, Sacavem (Portugal)
  • 3. Bonn Univ. (Germany, F.R.)
  • 4. Konstanz Univ. (Germany, F.R.)

Description

Hafnium and indium implanted diamonds have been studied using time differential perturbed angular correlations, Rutherford backscattering/channeling and sheet resistivity measurement techniques before and after annealing. It is shown that for fluences between 1014 and 1015 ions/cm2 the conductivity increases by a factor of about 104 to 107 with sample annealing, and reaches a constant value very close to that of graphite. Changes in depth profiles of the amorphised layer, produced by annealing, were observed. The temperature dependence of the resistivity was measured between 10K and 500K for the 160 KeV hafnium implanted diamond after annealing at 8000C

Additional details

Publishing Information

Publisher
Editions de la Physique.
Imprint Place
Les Ulis (France)
ISBN
2-86883-010-2
Imprint Title
Energy beam-solid interactions and transient thermal processing
Imprint Pagination
558 p.
Journal Page Range
p. 193-198.

Conference

Title
Annual conference of the Materials Research Society.
Dates
13-15 May 1985.
Place
Strasbourg (France).

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
18077700
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; DIAMONDS; DIFFERENTIAL PAC; ELECTRIC CONDUCTIVITY; HAFNIUM IONS; HIGH TEMPERATURE; INDIUM IONS; ION IMPLANTATION; LOW TEMPERATURE; MEDIUM TEMPERATURE; RUTHERFORD SCATTERING; SEMICONDUCTOR DEVICES; TEMPERATURE DEPENDENCE; THIN FILMS; VERY LOW TEMPERATURE
Descriptors DEC
ANGULAR CORRELATION; ATOMIC IONS; CARBON; CHARGED PARTICLES; CORRELATIONS; ELASTIC SCATTERING; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; HEAT TREATMENTS; IONS; MINERALS; NONMETALS; PERTURBED ANGULAR CORRELATION; PHYSICAL PROPERTIES; SCATTERING