Published January 2005
| Version v1
Journal article
Using bias superposition to test a thick film conductance sensor
Creators
- 1. Centre for Microsystems Research, Lancaster Univeristy, Lancaster, LA1 4YR (United Kingdom)
Description
A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique 'Bias Superposition' utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor
Availability note (English)
Available online at http://stacks.iop.org/1742-6596/15/161/jpconf5_15_027.pdf or at the Web site for the Journal of Physics. Conference Series (Online) (ISSN 1742-6596) http://www.iop.org/Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. Conference Series (Online)
- Journal Volume
- 15
- Journal Issue
- 1
- Journal Page Range
- p. 161-166
- ISSN
- 1742-6596
Conference
- Title
- 13. conference on sensors and their applications
- Dates
- 6-8 Sep 2005
- Place
- Medway (United Kingdom)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37000518
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTROMECHANICS; FILMS; INTERFACES; MEASURING METHODS; MICROSTRUCTURE; MONITORING; ON-LINE MEASUREMENT SYSTEMS; SIGNALS; TRANSDUCERS
- Descriptors DEC
- MECHANICS; ON-LINE SYSTEMS