Published January 1992
| Version v1
Journal article
Progress report on Aramis, the 2MV tandem at Orsay
Creators
- 1. Centre de Spectrometrie Nucleaire et de Spectrometrie de Masse, IN2P3-CNRS, 91 - Orsay (France)
Description
Aramis is a home built multipurpose 2 MV electrostatic tandem accelerator. A large variety of ions are available for high energy implantation. Characterization possibilities are also quite large in the Van de Graaff mode owing to the Penning positive ion source in the terminal. A second beam line is now available that sends the beam into the target chamber of the 200 kV medium current implanter. We will provide a progress report on the machine and present some results regarding in situ studies of multilayer mixing and implanted silicide layers. (orig.)
Additional details
Additional titles
- Augmented title (English)
- Si:Co
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B
- Journal Volume
- 62
- Journal Issue
- 3
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 416-420
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- Symposium C on high energy ion implantation.
- Acronym
- Spring meeting of the European Materials Research Society (E-MRS)
- Dates
- 28-30 May 1991.
- Place
- Strasbourg (France).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 23042599
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; ELECTROSTATIC ACCELERATORS; ION BEAMS; ION IMPLANTATION; ION SOURCES; MEV RANGE 01-10; RESEARCH PROGRAMS; SILICON; TANDEM ELECTROSTATIC ACCELERAT
- Descriptors DEC
- ACCELERATORS; BEAMS; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; MEV RANGE; SEMIMETALS