Published January 1992 | Version v1
Journal article

Progress report on Aramis, the 2MV tandem at Orsay

  • 1. Centre de Spectrometrie Nucleaire et de Spectrometrie de Masse, IN2P3-CNRS, 91 - Orsay (France)

Description

Aramis is a home built multipurpose 2 MV electrostatic tandem accelerator. A large variety of ions are available for high energy implantation. Characterization possibilities are also quite large in the Van de Graaff mode owing to the Penning positive ion source in the terminal. A second beam line is now available that sends the beam into the target chamber of the 200 kV medium current implanter. We will provide a progress report on the machine and present some results regarding in situ studies of multilayer mixing and implanted silicide layers. (orig.)

Additional details

Additional titles

Augmented title (English)
Si:Co

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B
Journal Volume
62
Journal Issue
3
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
416-420
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
Symposium C on high energy ion implantation.
Acronym
Spring meeting of the European Materials Research Society (E-MRS)
Dates
28-30 May 1991.
Place
Strasbourg (France).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
23042599
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; ELECTROSTATIC ACCELERATORS; ION BEAMS; ION IMPLANTATION; ION SOURCES; MEV RANGE 01-10; RESEARCH PROGRAMS; SILICON; TANDEM ELECTROSTATIC ACCELERAT
Descriptors DEC
ACCELERATORS; BEAMS; ELEMENTS; ENERGY RANGE; HEAT TREATMENTS; MEV RANGE; SEMIMETALS