Elementary particle energy analyzer

The device is used for contactless testing and diagnostics of integrated circuits using an electron beam. The beam passes through the central opening in the device to impact on the material under study, it excites secondary particles that pass back. They first pass through a braking field produced by conductive rings that have gradually growing central openings and are separated by insulation rings. A planar grid analyzer is placed behind the ring with the biggest opening. The central opening of the grid is closed with an insulating tube whose inner conducting layer is connected to earth potential while the outer conducting layer is connected to negative potential relative to the grid analyzer. As against similar devices, the analyzer advantage lies in improved resolution and reduced effect of tertiary particles. (M.D.). 1 fig