Gas processing device

State of electric discharge is detected based on a gas pressure in a sealed container and a discharging current flowing between both of electrodes. When electric arc discharges occur, introduction of gases to be processed is stopped and a voltage applied to both of the electrodes is interrupted. Then, when the gas pressure in the sealed container is lowered to a predetermined value, a power source voltage is applied again to both of the electrodes to recover glow discharges, and the introduction of the gas to be processed is started. With such steps, even if electric arc discharges occur, they are eliminated automatically and, accordingly, normal glow discharges can be recovered, to prevent failures of the device due to electric arc discharges. The glow discharges are recovered automatically without stopping the operation of the gas processing device, and gas injection and solidification processing can be conducted continuously and stably. (T.M.)