Published June 23, 2010 | Version v1
Journal article

Two-dimensional Detector for High Resolution Soft X-ray Imaging

  • 1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University (Japan)

Description

A new two-dimensional (2D) detector for detecting soft X-ray (SX) images was developed. The detector has a scintillator plate to convert a SX image into a visible (VI) one, and a relay optics to magnify and detect the converted VI image. In advance of the fabrication of the detector, quantum efficiencies of scintillators were investigated. As a result, a Ce:LYSO single crystal on which Zr thin film was deposited was used as an image conversion plate. The spatial resolution of fabricated detector is 3.0 μm, and the wavelength range which the detector has sensitivity is 30-6 nm region.

Additional details

Identifiers

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1234
Journal Issue
1
Journal Page Range
p. 811-814
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
10. international conference on radiation instrumentation
Acronym
SRI 2009
Dates
27 Sep - 2 Oct 2009
Place
Melbourne (Australia)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
42003503
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CONVERSION; FABRICATION; IMAGES; LUMINESCENCE; MONOCRYSTALS; OPTICS; PHOSPHORS; PLATES; QUANTUM EFFICIENCY; SENSITIVITY; SOFT X RADIATION; SPATIAL RESOLUTION; THIN FILMS; TWO-DIMENSIONAL CALCULATIONS; WAVELENGTHS
Descriptors DEC
CRYSTALS; EFFICIENCY; ELECTROMAGNETIC RADIATION; EMISSION; FILMS; IONIZING RADIATIONS; PHOTON EMISSION; RADIATIONS; RESOLUTION; X RADIATION

Optional Information

Notes
(c) 2010 American Institute of Physics