Study of ion beam mixing in Pt/Co bilayer by ion beam analysis

Ion beam mixing of the Pt/Co bilayers (400 A/700 A) were carried out using 600 keV Pt+ ions with fluences ranging from 1 x 1015 ions/cm2 to 1.2 x 1016 ions/cm2 at room temperature. The sputtering of top Pt layer and the diffusion of platinum and cobalt caused by the ion beam at the interface were revealed by RBS. The interface broadening variance for each fluence was extracted from the RBS spectra after subtracting the contribution to broadening variance due to surface roughness as measured by AFM. The linear dependence of interface broadening variance with fluence shows that ion beam mixing is diffusion controlled in Pt/Co bilayers