Published October 2014 | Version v1
Miscellaneous Restricted

Porous vs. magnetron RF sputtering of InP

Creators

  • 1. D. Gitsu Inst. of Electronic Engineering and Nanotechnology, MD-2028, Academiei str.3/3, Chisinau (Moldova, Republic of)
  • 2. National Inst. for R and D in Microtechnologies- IMT Bucharest, Erou Iancu Nicolae 126 A str., Bucharest (Romania)

Description

no abstract available

Files

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Part of:
5. conference of the physicists of Moldova. Abstracts

Additional details

Identifiers

URL
http://sfm.asm.md/cfm2014/cfm%202014%20abstracts.pdf;

Publishing Information

Imprint Place
Chisinau (Moldova, Republic of)
Imprint Title
5. conference of the physicists of Moldova. Abstracts
Imprint Pagination
116 p.
Journal Page Range
p. 47
Report number
INIS-MD--019

Conference

Title
5. conference of the physicists of Moldova. Abstracts
Dates
22-25 Oct 2014
Place
Chisinau (Moldova, Republic of)

INIS

Country of Publication
Moldova, Republic of
Country of Input or Organization
Moldova, Republic of
INIS RN
45102249
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
DEPOSITION; INDIUM COMPOUNDS; INDIUM PHOSPHIDES; PHOSPHIDES; PHOSPHORUS COMPOUNDS; RF SYSTEMS; SPUTTERING; TEMPERATURE RANGE 0273-0400 K
Descriptors DEC
INDIUM COMPOUNDS; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; TEMPERATURE RANGE

Optional Information

Notes
1 fig.