Field reversals in electrically asymmetric capacitively coupled radio-frequency discharges in hydrogen

In this paper, we present a simulation study of electrically asymmetric capacitively coupled radio-frequency hydrogen discharges using the hybrid plasma equipment model operated at the combined frequencies of 10 and 20 MHz. We find that, in such discharges, field reversals cause ionization near the electrodes during the sheath collapse. In the case of the investigated asymmetric voltage waveforms, the field reversals are asymmetrically distributed over the sheaths, which causes asymmetric ionization and density profiles. The asymmetry of these profiles can be controlled by the phase angle between the two frequencies. As a result, the possibility to control the ion energy independently from the ion flux via the electrical asymmetry effect (EAE) is reduced in discharges displaying strong field reversals, as the asymmetric field reversals compensate the electrically induced asymmetry. The reason for this is understood by an analytical model. Furthermore, we demonstrate, that the EAE can be restored by the addition of specific gases to a pure hydrogen discharge. (paper)