Published March 2006 | Version v1
Journal article Metadata-only

Transport line for beam generated by ITEP Bernas ion source

Creators

  • 1. PVI, Oxnard, California 93031-5023 (United States)
  • 2. Brookhaven National Laboratory, Upton, New York 11973 (United States)
  • 3. Moscow Engineering Physics Institute, Kashirskoe Shosse 31, Moscow 115409 (Russian Federation)
  • 4. Institute for Theoretical and Experimental Physics, Moscow 117218 (Russian Federation)

Description

A joint research and development program is underway to investigate beam transport systems for intense steady-state ion sources for ion implanters. Two energy extremes of MeV and hundreds of eV are investigated using a modified Bernas ion source with an indirectly heated cathode. Results are presented for simulations of electrostatic systems performed to investigate the transportation of ion beams over a wide mass range: boron to decaborane

Additional details

Identifiers

DOI
10.1063/1.2165746;

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
77
Journal Issue
3
Journal Page Range
p. 03C112-03C1123
ISSN
0034-6748
CODEN
RSINAK

Conference

Title
11. international conference on ion sources
Dates
12-16 Sep 2005
Place
Caen (France)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37083399
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAM TRANSPORT; BORON; CATHODES; ELECTROSTATIC LENSES; EV RANGE; ION BEAMS; ION IMPLANTATION; ION SOURCES; MEV RANGE; SIMULATION; STEADY-STATE CONDITIONS
Descriptors DEC
BEAMS; ELECTRODES; ELEMENTS; ENERGY RANGE; LENSES; SEMIMETALS

Optional Information

Notes
(c) 2006 American Institute of Physics