Published January 2006
| Version v1
Journal article
High-energy ion tracks in thin films
Creators
- 1. Sandia National Laboratories, Nanostructure and Semiconductor Physics, Mail Stop 1056, Albuquerque, NM 87185-1056 (United States)
- 2. University of North Texas, Denton, TX 76203 (United States)
- 3. Lawrence Livermore National Laboratory, Livermore, CA (United States)
Description
High-energy ion tracks (374 MeV Au26+) in thin films were examined with transmission electron microscopy to investigate nanopore formation. Tracks in quartz and mica showed diffraction contrast. Tracks in sapphire and mica showed craters formed at the positions of ion incidence and exit, with a lower-density track connecting them. Direct nanopore formation by ions (without chemical etching) would appear to require film thicknesses less than 10 nm
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2005.08.005;
- PII
- S0168-583X(05)01474-6;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 242
- Journal Issue
- 1-2
- Journal Page Range
- p. 79-81
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 14. international conference on ion beam modification of materials
- Dates
- 5-10 Sep 2004
- Place
- Pacific Grove, CA (United States)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37068385
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CRATERS; DENSITY; DIFFRACTION; ETCHING; IONS; MEV RANGE 100-1000; MICA; PARTICLE TRACKS; QUARTZ; SAPPHIRE; SPUTTERING; SURFACES; THICKNESS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY
- Descriptors DEC
- CAVITIES; CHARGED PARTICLES; COHERENT SCATTERING; CORUNDUM; DIMENSIONS; ELECTRON MICROSCOPY; ENERGY RANGE; FILMS; MEV RANGE; MICROSCOPY; MINERALS; OXIDE MINERALS; PHYSICAL PROPERTIES; SCATTERING; SILICATE MINERALS; SURFACE FINISHING
Optional Information
- Copyright
- Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.