Published September 2005 | Version v1
Miscellaneous

Renovation of the electrostatic ion accelerator ESA-2 for solid state materials investigations by ion-beam techniques

  • 1. Navukova-dasledchy inst. prykladnykh fizichnykh prablem imya A.N.Sewchanki, Belaruski dzyarzhawny univ., Minsk (Belarus)

Description

The paper deals with the results on the renovation of the electrostatic ion accelerator ESA-2, being used for research in the field of ion-solid interaction physics, both fundamental and applied. Usage of electrostatic accelerators both in quality of implanter, and as a source of ions for conducting of investigations of solid-state materials by non-destructive control methods, such as, for example, the Rutherford backscattering spectroscopy is discussed. (authors)

Part of:
Proceedings of the 6. international conference 'Interaction of radiation with solids'

Additional details

Additional titles

Original title (Russian)
Модернизация ускорителя EhSU-2, применяемого при исследованиях и разработке технологических процессов создания изделий микроэлектроники

Publishing Information

Imprint Place
Minsk (Belarus)
Imprint Title
Proceedings of the 6. international conference 'Interaction of radiation with solids'
Imprint Pagination
[442 p.]
Journal Page Range
p. 357-359
Report number
INIS-BY--069

Conference

Title
6. international conference 'Interaction of radiation with solids'
Original Conference Title
6. mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
Dates
28-30 Sep 2005
Place
Minsk (Belarus)

INIS

Country of Publication
Belarus
Country of Input or Organization
Belarus
INIS RN
36115352
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTROSTATIC ACCELERATORS; ION BEAMS; PROTONS; RADIATION DOSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY
Descriptors DEC
ACCELERATORS; BARYONS; BEAMS; DOSES; ELEMENTARY PARTICLES; FERMIONS; HADRONS; NUCLEONS; SPECTROSCOPY

Optional Information

Notes
5 refs., 3 figs. Imprint:Materialy 6. mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'