Published September 2005
| Version v1
Miscellaneous
Renovation of the electrostatic ion accelerator ESA-2 for solid state materials investigations by ion-beam techniques
Creators
- 1. Navukova-dasledchy inst. prykladnykh fizichnykh prablem imya A.N.Sewchanki, Belaruski dzyarzhawny univ., Minsk (Belarus)
Description
The paper deals with the results on the renovation of the electrostatic ion accelerator ESA-2, being used for research in the field of ion-solid interaction physics, both fundamental and applied. Usage of electrostatic accelerators both in quality of implanter, and as a source of ions for conducting of investigations of solid-state materials by non-destructive control methods, such as, for example, the Rutherford backscattering spectroscopy is discussed. (authors)
Additional details
Additional titles
- Original title (Russian)
- Модернизация ускорителя EhSU-2, применяемого при исследованиях и разработке технологических процессов создания изделий микроэлектроники
Publishing Information
- Imprint Place
- Minsk (Belarus)
- Imprint Title
- Proceedings of the 6. international conference 'Interaction of radiation with solids'
- Imprint Pagination
- [442 p.]
- Journal Page Range
- p. 357-359
- Report number
- INIS-BY--069
Conference
- Title
- 6. international conference 'Interaction of radiation with solids'
- Original Conference Title
- 6. mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'
- Dates
- 28-30 Sep 2005
- Place
- Minsk (Belarus)
INIS
- Country of Publication
- Belarus
- Country of Input or Organization
- Belarus
- INIS RN
- 36115352
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTROSTATIC ACCELERATORS; ION BEAMS; PROTONS; RADIATION DOSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY
- Descriptors DEC
- ACCELERATORS; BARYONS; BEAMS; DOSES; ELEMENTARY PARTICLES; FERMIONS; HADRONS; NUCLEONS; SPECTROSCOPY
Optional Information
- Notes
- 5 refs., 3 figs. Imprint:Materialy 6. mezhdunarodnoj konferentsii 'Vzaimodejstvie izluchenij s tverdym telom'