Published 2000 | Version v1
Miscellaneous Open

Size analysis of crystallites in Si nanocrystal layer obtained by hydrogen ion implantation

  • 1. NIIYaF MGU, Moscow (Russian Federation)
  • 2. IFP SO RAN, Novosibirsk (Russian Federation)

Description

no abstract available

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Part of:
Theses of reports of the 30. International conference on physics of interaction of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Анализ размеров кристаллов в нанокристаллическом слое Си, полученном имплантацией ионов водорода

Publishing Information

Publisher
MGU
Imprint Place
Moscow (Russian Federation)
Imprint Title
Theses of reports of the 30. International conference on physics of interaction of charged particles with crystals
Imprint Pagination
162 p.
Journal Page Range
p. 81
Report number
INIS-RU--460

Conference

Title
30. International conference on physics of interaction of charged particles with crystals
Original Conference Title
30. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
29-31 May 2000
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
34047533
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
CHANNELING; GRAIN SIZE; HYDROGEN IONS; ION BEAMS; ION IMPLANTATION; SILICON
Descriptors DEC
BEAMS; CHARGED PARTICLES; ELEMENTS; IONS; MICROSTRUCTURE; SEMIMETALS; SIZE

Optional Information

Notes
1 ref. Imprint:Tezisy dokladov 30. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami