Published June 12, 2006 | Version v1
Journal article Metadata-only

Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60 nm resolution tomography

Creators

  • 1. Department of Photonics and Display Institute, National Chiao Tung University, Hsinchu 300, Taiwan (China)
  • 2. Department of Electrical Engineering, Yuan Ze University, 135 Yuan Tung Road, Chungli 320, Taiwan (China)
  • 3. Xradia Inc., 5052 Commericial Circle, Concord, California 94520 (United States)
  • 4. National Synchrotron Radiation Research Center, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan (China)
  • 5. National Synchrotron Radiation Research Center, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan (China) and Department of Photonics and Display Institute National Chiao Tung University, Hsinchu 300, Taiwan (CN)

Description

An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope

Additional details

Identifiers

DOI
10.1063/1.2211300;

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
88
Journal Issue
24
Journal Page Range
p. 241115-241115.3
ISSN
0003-6951
CODEN
APPLAB

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37083690
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
ABSORPTION; COMPUTER CODES; FEEDBACK; HARD X RADIATION; ILLUMINANCE; MICROSCOPES; MICROSCOPY; PLATES; SPATIAL RESOLUTION; TOMOGRAPHY; TRANSMISSION
Descriptors DEC
DIAGNOSTIC TECHNIQUES; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; RADIATIONS; RESOLUTION; SORPTION; X RADIATION

Optional Information

Notes
(c) 2006 American Institute of Physics