The EPR study of inhomogeneous deformations in neutron-irradiated silicon

The tensosensitivity parameters of the EPR response of negatively charged divacancies (G7) to uniaxial compression are studied. The data obtained are used in the analysis of the EPR spectra of divacancies in silicon doped with elements of group V (P, As, Sb) within Ni = 2 x 1018 to 1 x 1019 cm-3 concentration range and neutron-irradiated by a reactor dose of D = 5 x 1017 to 4 x 1019 cm-2. On the assumption of the uniaxial character of local deformations, the average deformation of lattice outside the disordered regions (DR) is estimated as ε ∼ 10-4. The distribution of divacancies is given by absolute of deformations acting on them in the DR((dN/dε) = N · FN(ε)). The average value of the uniaxial deformation in DR is 1.1 x 10-3. (author)