Characteristic of VHF plasma produced by balanced power feeding

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.