Published January 28, 2016 | Version v1
Journal article Metadata-only

Upgrading multilayer zone plate technology for hard x-ray focusing

Creators

  • 1. SPring-8 Service Co., Ltd (Japan)
  • 2. Graduate School of Material Science, University of Hyogo, Kamigori, Hyogo 678-1297 (Japan)
  • 3. Japan Synchrotron Radiation Research Institute (JASRI/SPring-8) (Japan)
  • 4. NTT Advanced Technology Corporation (Japan)
  • 5. TOYAMA Corporation (Japan)

Description

Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi2 and Si layers alternately deposited on a glass fiber by magnetron sputtering so that all zone boundaries satisfy the Fresnel zone configuration. The focused beam was evaluated using knife-edge scanning in which the measured intensity distribution is identical to the line spread function (LSF) in the focal plane. The focused beamsize of about 30 nm was estimated by oscillation peaks observed in the measured LSF according to Rayleigh's criterion

Additional details

Identifiers

DOI
10.1063/1.4937511;

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
1696
Journal Issue
1
Journal Page Range
p. 020017-020017.4
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
12. international conference on X-ray microscopy
Acronym
XRM 2014
Dates
26-31 Oct 2014
Place
Melbourne (Australia)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47064589
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAMS; DEPOSITS; DISTRIBUTION; FIBERGLASS; FOCUSING; FRESNEL COEFFICIENT; HARD X RADIATION; KEV RANGE 10-100; LAYERS; MAGNETRONS; MOLYBDENUM SILICIDES; OSCILLATIONS; PEAKS; PLATES; RAYLEIGH NUMBER; SPRING-8 STORAGE RING; SPUTTERING; SYNCHROTRONS
Descriptors DEC
ACCELERATORS; COMPOSITE MATERIALS; CYCLIC ACCELERATORS; DIMENSIONLESS NUMBERS; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ENERGY RANGE; EQUIPMENT; IONIZING RADIATIONS; KEV RANGE; MATERIALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MOLYBDENUM COMPOUNDS; RADIATION SOURCES; RADIATIONS; REFRACTORY METAL COMPOUNDS; SILICIDES; SILICON COMPOUNDS; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; TRANSITION ELEMENT COMPOUNDS; X RADIATION

Optional Information

Notes
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