Published September 1, 2020
| Version v1
Journal article
On the simulation of the hysteresis loop of polycrystalline PZT thin films
Creators
- 1. Analog, MEMS and Sensors Group R & D, STMicroelectronics, Agrate Brianza and Cornaredo (Italy)
- 2. Department of Chemistry, Materials and Chemical Engineering, Politecnico di Milano, Milano (Italy)
- 3. Institute for Applied Materials, Karlsruhe Institute of Technology, Karlsruhe (Germany)
- 4. Department of Civil and Environmental Engineering, Politecnico di Milano, Milano (Italy)
Description
We investigate experimentally and numerically the polarization hysteresis loop of a PZT thin film utilized in MEMS actuators. A fully coupled electromechanical phase-field technique is employed for the numerical prediction part, starting from a simplified model of the thin film proposed on the basis of several experimental evidences. It is shown that polycrystalline nature of the film plays a fundamental role. In particular the simulations demonstrate that grains with dielectric interfaces and stochastic orientation of the crystallographic directions have a significant impact on the overall hysteresis loop. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1361-665X/ab9e0eAdditional details
Identifiers
Publishing Information
- Journal Title
- Smart Materials and Structures (Print)
- Journal Volume
- 29
- Journal Issue
- 9
- Journal Page Range
- [10 p.]
- ISSN
- 0964-1726
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 53045251
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ACTUATORS; CRYSTALLOGRAPHY; DIELECTRIC MATERIALS; HYSTERESIS; INTERFACES; MEMS; ORIENTATION; POLARIZATION; POLYCRYSTALS; PZT; SIMULATION; STOCHASTIC PROCESSES; THIN FILMS
- Descriptors DEC
- CRYSTALS; FILMS; LEAD COMPOUNDS; MATERIALS; OXYGEN COMPOUNDS; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONATES; ZIRCONIUM COMPOUNDS