Investigation the effect of porosity on corrosion of macroporous silicon in 1.0 M sodium hydroxide solution using weight loss measurements, electrochemical methods and scanning electron microscope

Highlights: • The dissolution of silicon wafers conforms Faraday's laws of electrolysis. • The porosity effect on macroporous silicon corrosion was investigated. • The corrosion rate increase linearly with porosity increasing. • The porosity effect on activation parameters was obtained. - Abstract: In this study, the macroporous silicon has been fabricated by electrochemical anodization. The dissolution of n-type silicon wafers in etching solution conforms Faraday's laws of electrolysis. The fabricated macroporous silicon with different porosity corrosion in 1.0 M NaOH was systemically investigated by weight loss measurements, electrochemical methods and scanning electron microscope. Results show that with the porosity increasing, the corrosion rate of macroporous silicon in 1.0 M NaOH increases linearly. In addition, the increase of corrosion rate of macroporous silicon with relative higher porosity was determined by the pre-exponential factor.