Published 1988 | Version v1
Book

Spectroscopic characterization techniques for semiconductor technology III

Description

These proceeding contain 29 chapters. The topics discussed are: Modulation spectroscopy; Ion-implanted CdTe photoreflectivity; bandgap shrinkage in silicon solar cells; ellipsometry, reflectance and transmission; gallium arsenides heterostructures; superlattices characterization; Raman scattering and photoluminence; reactive ion etching of MBE GaAs; Photoluminescence of InGaAlAs quaternary alloys; and structural and chemical characterization of dielectric films

Availability note (English)

SPIE Society of Photo-Optical Instrumentation Engineers, 1022 19 St., P.O. Box 10, Bellingham, WA 98227.

Additional details

Publishing Information

Publisher
SPIE Society of Photo-Optical Instrumentation Engineers.
Imprint Place
Bellingham, WA (USA)
Imprint Pagination
236 p.
Series
SPIE - Volume 946.

Conference

Title
Spectroscopic characterization techniques for semiconductor technology III.
Dates
14-15 Mar 1988.
Place
Newport Beach, CA (USA).

Optional Information

Secondary number(s)
CONF-8803147--.