Published January 1, 2005 | Version v1
Journal article

Atomic nanofabrication: perspectives for serial and parallel deposition

  • 1. Wegelerstr. 8, D-53115 Bonn (Germany)

Description

Recent advances in atomic nanofabrication with laser manipulated atomic beams are discussed with regard to the creation of arbitrary structures

Availability note (English)

Available online at http://stacks.iop.org/1742-6596/19/118/jpconf5_19_020.pdf or at the Web site for the Journal of Physics. Conference Series (Online) (ISSN 1742-6596) http://www.iop.org/

Additional details

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
19
Journal Issue
1
Journal Page Range
p. 118-124
ISSN
1742-6596

Conference

Title
Conference on atoms and molecules near surfaces
Acronym
CAMS
Dates
4-8 Apr 2005
Place
Heidelberg (Germany)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37003028
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ATOMIC BEAMS; DEPOSITION; FABRICATION; LASERS; NANOSTRUCTURES
Descriptors DEC
BEAMS