Backscattering coefficients and mean penetration depths of 1-4 keV electron scattering in solids

In the present study, we have performed Monte Carlo simulation of 1-4 keV electrons impinging on semi-infinite Al and Au to determine the transport cross-section, the backscattering coefficient and the mean penetration depth using a new approximation of the differential elastic scattering cross section. The mean number of the wide angle collisions suffered by the electron before slowing down to rest, and the backscattering coefficient are analytically calculated using Vicanek and Urbassek theory. The analytical results are compared with the numerical ones obtained from Monte Carlo simulation. The present results are found to reveal good agreement with experimental results. (orig.)