Published 2023 | Version v1
Journal article Metadata-only

Morphology and sputtering of tungsten nitrides coatings exposed to deuterium plasma

Creators

  • 1. National Science Center "Kharkov Institute of Physics and Technology, Kharkiv (Ukraine)

Description

Processes of sputtering, surface modification and change in the stoichiometric composition of W and WN coatings deposited on stainless steel by cathodic arc evaporation were studied under the influence of low-energy (500 eV/D) deuterium plasma with fluence of (1…4.5)·1024 D2+/m2 at room temperature. The composition of the WN coating changes under the influence of deuterium plasma, its enrichment with tungsten up to 100% is observed. Results of erosion studies indicated that the sputtering yields for coatings WN and W are ∼2.4·10-2 at./ion and to be systematically higher than the published data which were measured for bulk materials. (author)

Additional details

Publishing Information

Journal Title
Voprosy Atomnoj Nauki i Tekhniki
Journal Issue
no.1-143
Journal Page Range
p. 57-62
ISSN
1562-6016

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
54074145
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
DEUTERIUM IONS; MORPHOLOGY; PHYSICAL RADIATION EFFECTS; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SPUTTERING; STAINLESS STEELS; STOICHIOMETRY; SUBSTRATES; SURFACE COATING; TUNGSTEN; TUNGSTEN NITRIDES
Descriptors DEC
ALLOYS; CARBON ADDITIONS; CHARGED PARTICLES; DEPOSITION; ELECTRON MICROSCOPY; ELEMENTS; HIGH ALLOY STEELS; IONS; IRON ALLOYS; IRON BASE ALLOYS; METALS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; REFRACTORY METAL COMPOUNDS; REFRACTORY METALS; STEELS; SURFACE COATING; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; TUNGSTEN COMPOUNDS