Published 2005
| Version v1
Book
Target temperature effect on angular dependences of sputtering coefficients for ceramics
- 1. Moskovskij Aviatsionnyj Inst. - Gosudarstvennyj Tekhnicheskij Univ., Moscow (Russian Federation)
Description
An experimental study is made into the dependence of sputtering coefficients for ceramics Si3N4 + BN on 300 eV Xe+ ion incidence angles (0-62 deg) at surface temperature ranging from 330 to 820 deg C. A weight method is used to determine sputtering coefficients. It is shown that the value of a sputtering coefficient grows with an incidence angle. The rate of sputtering coefficient increase is higher at low temperatures of the target compared to more temperatures. Absolute and relative values of sputtering coefficients at various incidence angles of ions and target temperatures are given
Abstract (Russian)
Экспериментально исследована зависимость коэффицента распыления керамики Si3N4 + BN от угла падения (0-62 град) ионов Хе+ с энергией 300 эВ при температуре поверхности от 330 до 820 град С. Коэффициенты распыления определяли весовым методом. Показано, что величина коэффициента распыления возрастает с увеличением угла падения. Скорость роста коэффициентов распыления при низких температурах мишени выше, чем при высоких. Приведены абсолютные и относительные значения коэффициентов распыления при различных углах падения ионов и температурах мишениAdditional details
Additional titles
- Original title (Russian)
- Влияние температуры мишени на угловые зависимости коэффициентов распыления керамик
Publishing Information
- Publisher
- Izd-vo MAI
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 5-7035-1560-2
- Imprint Title
- Book of reports of XVII International conference Ion-surface interactions ISI-2005. Vol. 1
- Imprint Pagination
- 600 p.
- Journal Page Range
- p. 111-113
Conference
- Title
- 17. International conference Ion-surface interactions ISI-2005
- Original Conference Title
- XVII Mezhdunarodnaya konferentsiya Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005)
- Dates
- 25-29 Aug 2005
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38067490
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANGULAR DISTRIBUTION; BORON NITRIDES; CERAMICS; EV RANGE 100-1000; INCIDENCE ANGLE; ION IMPLANTATION; PHYSICAL RADIATION EFFECTS; SILICON NITRIDES; SPUTTERING; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; XENON IONS
- Descriptors DEC
- BORON COMPOUNDS; CHARGED PARTICLES; DISTRIBUTION; ENERGY RANGE; EV RANGE; IONS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; SILICON COMPOUNDS; TEMPERATURE RANGE
Optional Information
- Notes
- 3 refs., 3 figs., 1 tab. Imprint:Materialy XVII Mezhdunarodnoj konferentsii Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005). Tom 1