Published 1993 | Version v1
Book

A remote control device for changing targets of the multi-target and high-intensity sputter source

Description

no abstract available

Additional details

Publishing Information

Publisher
Atomic Energy Press
Imprint Place
Beijing (China)
ISBN
7-5022-0989-1
Imprint Title
Annual Report of Shanghai Institute of Nuclear Research Academia Sinica (1992)
Imprint Pagination
128 p.
Journal Page Range
p. 99-100

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
30042115
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ION SOURCES; REMOTE CONTROL; SPUTTERING; TARGETS
Descriptors DEC
CONTROL