Published 1993
| Version v1
Book
A remote control device for changing targets of the multi-target and high-intensity sputter source
Creators
Description
no abstract available
Additional details
Publishing Information
- Publisher
- Atomic Energy Press
- Imprint Place
- Beijing (China)
- ISBN
- 7-5022-0989-1
- Imprint Title
- Annual Report of Shanghai Institute of Nuclear Research Academia Sinica (1992)
- Imprint Pagination
- 128 p.
- Journal Page Range
- p. 99-100
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 30042115
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ION SOURCES; REMOTE CONTROL; SPUTTERING; TARGETS
- Descriptors DEC
- CONTROL