Ion source with a cold cathode

Ion source with removed cold cathode and different form holes with the square of up to 0.2 cm2 for ion beam extraction generating ion beams with ion current up to 200 μA, ion current density of up to 1 mA/cm2, the discharge voltage in the range of 0.5-2 kV is described. The source has two chambers -ionization chamber with crossed electrical and magnetic fields and accelerating one with coinsiding directions of electric and magnetic field force lines. The source provides for 1 μm/h quartz glass sputtering