Development of industrial ion implantation and ion assisted coating processes: A perspective
Description
Ion beam processes have gone through a series of developmental stages, from being the mainstay of the semiconductor industry for production of integrated circuits, to new commercial processes for biomedical, aerospace and other industries. Although research is still continuing on surface modification using ion beam methods, ion implantation and ion assisted coatings for treatment of metals, ceramics, polymers and composites must now be considered viable industrial processes of benefit in a wide variety of applications. However, ion implantation methods face various barriers to acceptability, in terms not only of other surface treatment processes, but for implantation itself. This paper will discuss some of the challenges faced by a small company whose primary business is development and marketing of ion implantation and ion-assisted coating processes. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research, Section B
- Journal Volume
- 40/41
- Journal Issue
- pt.1
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 562-566
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 10. conference on the application of accelerators in research and industry.
- Dates
- 7-9 Nov 1988.
- Place
- Denton, TX (USA).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 20075582
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CERAMICS; COATINGS; COMPOSITE MATERIALS; INTEGRATED CIRCUITS; ION BEAMS; ION IMPLANTATION; LABORATORY EQUIPMENT; POLYMERS
- Descriptors DEC
- BEAMS; ELECTRONIC CIRCUITS; EQUIPMENT; MATERIALS