Published April 1989 | Version v1
Journal article

Development of industrial ion implantation and ion assisted coating processes: A perspective

  • 1. Ionic Atlanta, GA (USA)

Description

Ion beam processes have gone through a series of developmental stages, from being the mainstay of the semiconductor industry for production of integrated circuits, to new commercial processes for biomedical, aerospace and other industries. Although research is still continuing on surface modification using ion beam methods, ion implantation and ion assisted coatings for treatment of metals, ceramics, polymers and composites must now be considered viable industrial processes of benefit in a wide variety of applications. However, ion implantation methods face various barriers to acceptability, in terms not only of other surface treatment processes, but for implantation itself. This paper will discuss some of the challenges faced by a small company whose primary business is development and marketing of ion implantation and ion-assisted coating processes. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section B
Journal Volume
40/41
Journal Issue
pt.1
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
562-566
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
10. conference on the application of accelerators in research and industry.
Dates
7-9 Nov 1988.
Place
Denton, TX (USA).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
20075582
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CERAMICS; COATINGS; COMPOSITE MATERIALS; INTEGRATED CIRCUITS; ION BEAMS; ION IMPLANTATION; LABORATORY EQUIPMENT; POLYMERS
Descriptors DEC
BEAMS; ELECTRONIC CIRCUITS; EQUIPMENT; MATERIALS