Published March 1996
| Version v1
Journal article
Asymmetric scew topography and diffractometry of submicron layers
- 1. Chernovitskij Gosudarstvennyj Univ., Chernovtsy (Ukraine)
Description
Asymmetric scew diffraction in back reflection geometry offers a new tool for analyzing thin surface layers of crystals. We show an X-ray beam to be sensitive down to a roughness of 0.025 μm if its incidence to the crystal surface is close to the critical angle of total reflection. Examples presented are: InSb/InSb epitaxial structures, CdTe surfaces after different types of chemical-mechanical treatment and InSb subsurface layers after laser treatment. 21 refs., 4 figs
Additional details
Publishing Information
- Journal Title
- Poverkhnost': Fizika, Khimiya, Mekhanika
- Journal Issue
- no.3-4
- Journal Page Range
- p. 160-172.
- ISSN
- 0207-3528
- CODEN
- PFKMDJ
Conference
- Title
- interference phenomena in X-ray scattering.
- Acronym
- International conference
- Dates
- 14-19 Aug 1995.
- Place
- Moscow (Russian Federation).
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 27055731
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CADMIUM TELLURIDES; INCIDENCE ANGLE; INDIUM ANTIMONIDES; MEASURING METHODS; REFLECTION; ROUGHNESS; SURFACES; THIN FILMS; TOPOGRAPHY; X-RAY DIFFRACTION
- Descriptors DEC
- ANTIMONIDES; ANTIMONY COMPOUNDS; CADMIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; FILMS; INDIUM COMPOUNDS; PNICTIDES; SCATTERING; SURFACE PROPERTIES; TELLURIDES; TELLURIUM COMPOUNDS