Published 2015 | Version v1
Miscellaneous

Study of degradation of polyimide films in oxygen plasma flows by means of RBS and NBS

  • 1. MATI-RGTU im. K.Eh. Tsiolkovskogo, Moscow (Russian Federation)
  • 2. NIIYaF MGU, Moscow (Russian Federation)

Description

no abstract available

Part of:
Summaries of reports of XLV International Tulinov conference on physics of interactions of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Исследование деградации полиимидных пленок в потоках кислородной плазмы методами ROR и YaOR

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XLV International Tulinov conference on physics of interactions of charged particles with crystals
Imprint Pagination
190 p.
Journal Page Range
p. 157
Report number
INIS-RU--607

Conference

Title
45. International Tulinov conference on physics of interactions of charged particles with crystals
Original Conference Title
XLV mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
26-28 May 2015
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
49086331
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
CHEMICAL COMPOSITION; EXPERIMENTAL DATA; IMIDES; ORGANIC POLYMERS; OXYGEN; PLASMA; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THICKNESS; THIN FILMS
Descriptors DEC
DATA; DIMENSIONS; ELEMENTS; FILMS; INFORMATION; NONMETALS; NUMERICAL DATA; ORGANIC COMPOUNDS; ORGANIC NITROGEN COMPOUNDS; POLYMERS; SPECTROSCOPY

Optional Information

Notes
Imprint:Tezisy dokladov XLV mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami