Published September 9, 2005
| Version v1
Journal article
Practical Applications of XRR-XRF Metrology Tool
Creators
- 1. CEA-DRT-LETI - CEA-GRE , 17 rue des Martyrs, 38054 Grenoble Cedex 9 (France)
- 2. STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex (France)
Description
X-Ray Reflectometry (XRR) and micro-spot X-Ray Fluorescence (XRF) are well-known non-destructive methods to characterize thin films in terms of thickness, density, roughness and composition. We use a JVX 5200 XRR-XRF-combined Metrology Tool from Jordan Valley on a routine basis, which gives us valuable information to monitor and/or qualify a wide range of processes. In this work, we present characterization results obtained for both copper barrier applications and high-k (HfO2, HfO2/Al2O3 alloys and nanolaminates) studies
Additional details
Identifiers
- DOI
- 10.1063/1.2062984;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 788
- Journal Issue
- 1
- Journal Page Range
- p. 329-332
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 2005 international conference on characterization and metrology for ULSI technology
- Dates
- 15-18 Mar 2005
- Place
- Richardson, TX (United States)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37031527
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM OXIDES; COPPER; DENSITY; DIELECTRIC MATERIALS; FLUORESCENCE; HAFNIUM OXIDES; MEASURING METHODS; REFLECTION; ROUGHNESS; THICKNESS; THIN FILMS; TOPOGRAPHY; X-RAY FLUORESCENCE ANALYSIS
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL ANALYSIS; DIMENSIONS; ELEMENTS; EMISSION; FILMS; HAFNIUM COMPOUNDS; LUMINESCENCE; MATERIALS; METALS; NONDESTRUCTIVE ANALYSIS; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; PHYSICAL PROPERTIES; REFRACTORY METAL COMPOUNDS; SURFACE PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; X-RAY EMISSION ANALYSIS
Optional Information
- Notes
- (c) 2005 American Institute of Physics