Infrared system for thermal resistance measurement of microobjects

The original measuring system and method of temperature fields measuring of integrated circuits chips for controlling of thermal resistance between a chip and its case under production conditions is presented. The infrared system allows temperature measuring over the range (40-150)°C, and also allows to spot small gains of IC chips temperature around 1°C. The developed system based on infrared microbolometric matrix and allows controlling of integrated circuits chips temperature fields with the high spatial resolution up to 15 microns. (paper)