Published 1900
| Version v1
Book
Quantitative analysis of boron and aluminium in silicon using the Castaing-Slodzian ion analyzer
- 1. CEA Centre d'Etudes Nucleaires de Grenoble, 38 (France). Service de Chimie Analytique
- 2. CEA Centre d'Etudes Nucleaires de Grenoble, 38 (France). Lab. d'Electronique et de Technologie de l'Informatique
Description
no abstract available
Additional details
Additional titles
- Original title (French)
- Analyses quantitatives de bore et d'aluminium dans le silicium au moyen de l'analyseur ionique Castaing-Slodzian
Publishing Information
- Publisher
- Centre d'Etudes Nucleaires. Laboratoire d'Electronique et de Technologie de l'Informatique.
- Imprint Place
- Grenoble, France
- Imprint Title
- Proceedings of the colloquium on the characterization of semiconductor materials and technologies
- Imprint Pagination
- p. 283-288.
Conference
- Title
- Colloquium on the physicochemical and electrical properties of semiconductor materials and the manufacturing processes for these materials.
- Dates
- 27 Sep 1972.
- Place
- Grenoble, France.
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 5116637
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM; BORON; DEPTH; DISTRIBUTION; ION PROBES; QUANTITATIVE CHEMICAL ANALYSIS; SEMICONDUCTOR MATERIALS; SILICON; SPUTTERING
- Descriptors DEC
- CHEMICAL ANALYSIS; DIMENSIONS; ELEMENTS; METALS; PROBES; SEMIMETALS
Optional Information
- Notes
- Imprint:Comptes rendus du colloque caracterisation des materiaux et technologies des semiconducteurs.