Published October 2000 | Version v1
Journal article

Degradation of polyimide induced by nitrogen laser irradiation

Description

The degradation behavior of polyimide (PMDA-ODA) induced by nitrogen laser irradiation was studied. The changes in the surface morphology and the composition of the irradiated polyimide films were examined by scanning electron microscopy, X-ray photoelectron spectroscopy and FT-IR spectroscopy. The initial reaction was achieved by photochemical degradation of polyimide in the highly electronic excited state by the absorption of a second 337 nm photon. Atmospheric oxygen sequentially reacted with the produced radicals to form a highly oxidized layer. The formation of carbonyl group was enhanced by the heat remaining on the irradiated polyimide film surfaces

Additional details

Identifiers

PII
S0168583X00002573;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
170
Journal Issue
3-4
Journal Page Range
p. 406-412
ISSN
0168-583X
CODEN
NIMBEU

Optional Information

Copyright
Copyright (c) 2000 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.