Published September 1989 | Version v1
Journal article Metadata-only

Angular and energy dependences of the sputtering coefficient of iron-yttrium garnet films

Creators

  • 1. Leningradskij Ehlektrotekhnicheskij Inst., Leningrad (USSR)

Description

A relative sputtering coefficient of iron-yttrium garnet Y3Fe5O12 films has been studied as a function of the incidence angle and argon-ion energy within the interval of angles 0-60 deg and at energy 0.5-1.5 keV. The experimental results do not agree with Siegmund's theory

Additional details

Additional titles

Original title (Russian)
Угловая и энергетическая зависимости коэффициента распыления пленок железоиттриевого граната

Publishing Information

Journal Title
Poverkhnost': Fizika, Khimiya, Mekhanika
Journal Issue
no.9
Series
Poverkhn.: Fiz., Khim., Mekh.
CODEN
PFKMD

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
22020521
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ARGON IONS; ENERGY DEPENDENCE; EV RANGE 100-1000; FERRITE GARNETS; INCIDENCE ANGLE; KEV RANGE 01-10; SPUTTERING; THIN FILMS; YTTRIUM COMPOUNDS
Descriptors DEC
CHARGED PARTICLES; ENERGY RANGE; EV RANGE; FILMS; IONS; KEV RANGE; MINERALS; OXIDE MINERALS; TRANSITION ELEMENT COMPOUNDS