Published November 14, 2018 | Version v1
Journal article

Spokes in high power impulse magnetron sputtering plasmas

  • 1. Institute for Experimental Physics II, Ruhr-University Bochum (Germany)

Description

High-power impulse magnetron sputtering is a deposition technique where a metal magnetron target is sputtered in a high-density plasma to synthesise thin layers with superior properties on a substrate material. These plasmas are characterised by short pulses in the range of 50 μs to 200 μs and very high peak powers in the range of several kW cm−2 per target area. Understanding these dynamic plasmas is of upmost importance for the further development of this coating technique. Fast camera measurements have revealed the formation of localised ionisation zones in these plasmas, which propagate with a velocity of the order km s−1. In the case of a circular magnetron, these ionisation zones appear to move like a set of spokes, which has led to the expression spoke being commonly used to illustrate the pattern formation in these high-density plasmas. Analysing, understanding and theoretically describing the spoke phenomenon is still a matter of open debate, which is hampered by the inherent complexity of these plasmas. In this paper, we review the experimental observations of the spoke phenomenon and highlight several approaches for their theoretical explanation. (topical review)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6463/aadaa1

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Physics. D, Applied Physics
Journal Volume
51
Journal Issue
45
Journal Page Range
[15 p.]
ISSN
0022-3727
CODEN
JPAPBE

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
52054747
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
COATINGS; DEPOSITION; IONIZATION; MAGNETRONS; PEAK LOAD; PLASMA DENSITY; SUBSTRATES; THIN FILMS
Descriptors DEC
ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; MICROWAVE EQUIPMENT; MICROWAVE TUBES