Published April 1979 | Version v1
Journal article Metadata-only

Study of a glow dischage in a diode sputtering system

Creators

  • 1. Nantes Univ., 44 (France)

Description

An argon DC glow discharges in a diode sputtering system fitted with a titanium cathode is investigated. Measurements are made beyond a power threshold which turns the discharge abnormal. The electron energy distributions and densities of slow and secondary electrons have been studied with simple probes and grid probes; for the two groups the distributions are of the Druyvesteyn type. Spectroscopic studies allowed us to point out the end of the presputtering stage, and show that, near the substrate, the intensity of the titanium lines is proportionnal to the deposition rate. R X diffraction patterns of the titanium deposits show up two prefered orientation; oxygen concentration is measured by nuclear reaction and α backscattering

Abstract (French)

On a etudie une decharge d'argon dans un systeme de pulverisation de type diode equipe d'une cathode en titane. Les mesures sont effectuees au dela d'un seuil de puissance qui rend la decharge anormale. La distribution en energie des electrons et les densites des electrons lents et secondaires ont ete etudiees avec des sondes simples et a grille. Pour les deux groupes, les distributions sont du type Druyvesteyn. Les etudes spectroscopiques ont permis de voir la fin de la prepulverisation et d'etablir que, pres du substrat, L'intensite des raies de titane est proportionnelle a la vitess de depot. Les diagrammes de diffraction X des depots de titane montrent deux orientations preferentielles; la concentration en oxygene a ete mesuree par reactions nucleaires et retrodiffusion α

Additional details

Additional titles

Original title (French)
Etude d'une decharge de pulverisation de type diode continu

Publishing Information

Journal Title
Vide. Couches Minces
Journal Issue
no.196 suppl
Series
Vide. Couches Minces.
ISSN
0042-5281

Conference

Title
3. International congress on cathodic sputtering and related applications. CIP 79.
Dates
11 Sep 1979.
Place
Nice, France.

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
11519171
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARGON; CATHODES; ELECTRON DENSITY; ELECTRONS; ENERGY SPECTRA; GLOW DISCHARGES; SPUTTERING; TITANIUM
Descriptors DEC
ELECTRIC DISCHARGES; ELECTRODES; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; LEPTONS; METALS; NONMETALS; RARE GASES; SPECTRA; TRANSITION ELEMENTS