Published 1988 | Version v1
Book Metadata-only

Reaction mechanisms of some electron beam, X-ray, ion beam and excimer laser resists studied by picosecond and nanosecond pulse radiolysis and laser photolysis

Creators

  • 1. Tokyo Univ. (Japan). Research Center for Nuclear Science and Technology

Description

Published in summary form only

Additional details

Publishing Information

Publisher
Faculty of Engineering, Tokyo Univ.
Imprint Place
Tokyo (Japan)
Imprint Title
Proceedings of conference on radiation curing Asia (CRCA '88)
Imprint Pagination
549 p.
Journal Page Range
p. 49-51.

Conference

Title
Conference on radiation curing Asia (CRCA '88).
Dates
17-19 Oct 1988.
Place
Tokyo (Japan).

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
20067848
Subject category
S38: RADIATION CHEMISTRY, RADIOCHEMISTRY AND NUCLEAR CHEMISTRY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
CHEMICAL REACTION KINETICS; DIELECTRIC MATERIALS; ELECTRON BEAMS; ION BEAMS; ORGANIC POLYMERS; PULSE TECHNIQUES; RADIOLYSIS; REACTION INTERMEDIATES
Descriptors DEC
BEAMS; CHEMICAL RADIATION EFFECTS; CHEMICAL REACTIONS; DECOMPOSITION; KINETICS; LEPTON BEAMS; MATERIALS; ORGANIC COMPOUNDS; PARTICLE BEAMS; POLYMERS; RADIATION EFFECTS; REACTION KINETICS