Published 1997
| Version v1
Journal article
Thin film characterisation using backscattering spectrometry
Creators
- 1. National Centre for Compositional Characterisation of Materials, Hyderabad (India)
Description
The use of proton resonance backscattering spectrometry for the estimation of carbon as thin films formed on a target material is discussed. Conventional He backscattering experiments were also carried out on TiVN films formed on beryllium backing but the determination of stoichiometry of these films were difficult using conventional software for depth resolution. (author)
Additional details
Publishing Information
- Journal Title
- Journal of Radioanalytical and Nuclear Chemistry
- Journal Volume
- 217
- Journal Issue
- 2
- Journal Page Range
- p. 293-295.
- ISSN
- 0236-5731
- CODEN
- JRNCDM
Conference
- Title
- 9. International conference on modern trends in activation analysis.
- Dates
- 24-30 Sep 1996.
- Place
- Seoul (Korea, Republic of).
INIS
- Country of Publication
- Hungary
- Country of Input or Organization
- Hungary
- INIS RN
- 28046582
- Subject category
- S36: MATERIALS SCIENCE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BACKSCATTERING; CARBON; DIAGRAMS; HELIUM IONS; PROTONS; RUTHERFORD SCATTERING; SURFACES; THIN FILMS; TITANIUM NITRIDES; VANADIUM NITRIDES
- Descriptors DEC
- BARYONS; CATIONS; CHARGED PARTICLES; ELASTIC SCATTERING; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; FILMS; HADRONS; HYDROGEN IONS; HYDROGEN IONS 1 PLUS; INFORMATION; IONS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; NUCLEONS; PNICTIDES; SCATTERING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; VANADIUM COMPOUNDS
Optional Information
- Notes
- 4 refs.