Published 1999 | Version v1
Book

Proton irradiation induced defects in 6H- and 4H-SiC

  • 1. Technische Univ., Graz (Austria). Inst. fuer Technische Physik
  • 2. Technische Hochschule, Darmstadt (Germany)
  • 3. McMaster Univ., Hamilton, Ontario (Canada)

Description

Annealing of defects in proton irradiated bulk n-type 6H- and semi-insulating 4H-SiC has been investigated by positron lifetime spectroscopy and Doppler-broadening measurements. For the n-type sample radiation induced defects in dependence of the proton fluence were studied. Three or four annealing stages were found, during which the formation of larger defect complexes could be observed

Additional details

Publishing Information

Publisher
Materials Research Society
Imprint Place
Warrendale, PA (United States)
ISBN
1-55899-446-7
Imprint Title
Microstructural processes in irradiated materials
Imprint Pagination
754 p.
Series
Materials Research Society symposium proceedings, Volume 540
Journal Page Range
p. 177-182
ISSN
0272-9172

Conference

Title
1998 Fall Meeting of the Materials Research Society
Dates
30 Nov - 4 Dec 1998
Place
Boston, MA (United States)

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
30052060
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
ANNEALING; CRYSTAL DEFECTS; EXPERIMENTAL DATA; N-TYPE CONDUCTORS; PHYSICAL RADIATION EFFECTS; SILICON CARBIDES
Descriptors DEC
CARBIDES; CARBON COMPOUNDS; CRYSTAL STRUCTURE; DATA; HEAT TREATMENTS; INFORMATION; MATERIALS; NUMERICAL DATA; RADIATION EFFECTS; SEMICONDUCTOR MATERIALS; SILICON COMPOUNDS